Analysis and modeling of hysteresis of piezoelectric micro-actuator used in high precision dual-stage servo system

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摘要 Adual-stageservosystemconsistsofaprimarycoarseactuatorforfacilitatinglargemotionandasecondarymicro-actuatorforsmallbutprecisemotiontoimprovetrackingperformance.Piezoelectricmicro-actuatormadefromleadzirconatetitanate(PZT)hasbeenapopularchoiceforthesecondarystage.However,theadvantagegainedbytheresolutionofthesecondaryPZTactuatorisreducedbyitsinherenthysteresisnonlinearity.Modelbasedhysteresiscompensationtechniquesarepreferredduetotheirsimplicityandfastresponse.Identificationandmodelingaretwosubstantialpartsinsuchmodel-basedtechniques.ThispaperpresentsarigorousanalysisandmodelingofthehysteresisofPZTmicro-actuator.ModifiedGeneralizedPrandtl-IshlinskiiandColeman-Hodgdonmodelsarestudied.Identificationofthemodelthroughnonlinearleastsquareandparticleswarmoptimizationareexaminedandcompared.Severalanalysesaredonethroughtuningofthemodelparametersandidentificationtechniques.Experimentalanalysisandsimulationresultsunderscoretheeffectivenessofthismodelingapproach.Finallyasadesignexample,adual-stagesimulationanalysisisdonetoshowtheeffectivenessofsystematicmodelingonhysteresiscompensation.
机构地区 不详
出版日期 2015年02月12日(中国期刊网平台首次上网日期,不代表论文的发表时间)
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