简介：Tosolvetheproblemonthemicrostructuralcharacterizationofmetallicsuperlattices,takingtheNiFe/Cusuperlatticesasexample,weshowthatthesturcturesofmetallicsuperlatticescanbecharacterizedexactlybycombininglow-angleX-raydiffractionwithhigh-angleX-raydiffraction.First,wedetermineexactlythetotalfilmthicknessbyastraightforwardandprecisemethodbasedonamodifiedBragglawfromthesubsidiarymaximaaroundthelow-angleX-raydiffractionpeak.Then.bycombiningwiththesimulationofhigh-angleX-raydiffraction.weobtainthesturcturalparameterssuchasthesuperlatticeperiod,thesublayerandbufferthickness,Thischaracterizationprocedureisalsoapplicabletoothertypesofmetallicsuperlattices.