简介：basedonoptimaldesignonthecoreelementofthesensor,awirelessandpassivesurfaceacousticwave(SAW)temperaturesensorintegratedwithIDTagwaspresented.Areflectivedelayline,whichconsistsofatransducerandeightreflectorsonYZLiNbO3substrate.Wasfabricatedasthesensorelement,inwhich,threereflectorswereusedfortemperaturesensing,andtheotherfivewerefortheIDTagusingphaseencoding.Singlephaseunidirectionaltransducers(SPUDTs)andshortedgratingwereusedtostructurethesAWdevice,leadingtoexcellentsignaltonoiseratio(SNR).TheperformanceoftheSAWdevicewassimulatedbythecouplingofmodes(COM)priortofabrication.Usingthenetworkanalyzer,theresponseintimedomainofthefabricated434MHzSAWsensorwascharacterized,themeasuredS11agreeswellwiththesimulatedone,sharpreflectionpeaks,highsignal/noise,andlowspuriousnoisebetweenthereflectionpeakswereobserved.UsingtheradarsystembasedonFSCWasthereaderunit.thedevelopedSAWtemperaturesensorswereevaluatedwirelessly.Excellent1inearityandgoodresolutionof士1℃wereobserved.