简介:研究表明含氟气体的性质决定了原子氟(F)的转化效率,通常在CxFy气体中x的值越大,氟(F)的转化效率也就会越高。所以C3F8(八氟丙烷)比C2F6(乙氟烷)具有更高的利用效率,更少的PFC(全氟化物)的排放。文章主要研究在以四乙氧基硅烷(TOES)为基础的离子增强化学气相沉积(PlasmaEnhancedChemicalVaporDeposition,PECVD)的清洗制程中,利用分解效率高的C3F8气体取代C2F6气体。通过实验设计(DesignOfExperiment,DOE),调整腔体压力、射频(RF)功率、气体流量等参数,最终得到最优化的新清洗配方。应用到实际的量产中,有效地降低了成本,减少了PFC的排放。
简介:Inthispaper,wedemonstratetheacetylehe(C2H2)sensorwithhighsensitivityusingahollow-corephotonicbandgapfiber(HC-PCF).ExperimentsformeasuringC2H2concentrationsingasmixtureareperformed.Usinga2m-longHC-PCFasgascell,thespectrumofacetyleneatn1+n3bandhasbeenmeasured,andtheP11-branchhasbeenselectedforthepurposeofsensing.Aminimumdetectivityof143partspermillionbyvolume(ppmv)forthesystemconfigurationisestimated.
简介:ThepreparationofPT/PEK-cfilmsisreportedaswellastheirdielectricandopticalproperties.Thec-axisorientationratioofthefilmsis68%.Dielectricconstantandlossfactorat10kHzisabout4.023F/mand0.003,respectively.Therefractiveindicesofthefilms,neandno,are1.6573and1.6278at0.63μmwavelength,respectively.Theopticalband-gapofthefilmwithathicknessof2.33μmisfoundtobe3.06eV
简介:全球半导体行业沉积设备供应商AIXTRON凭借其全自动新产品——金属氧化物化学汽相沉积(MOCVD)系统AIXG5+C,获商业杂志CompoundSemiconductor颁授2016年CSHigh-VolumeManufacturingAward奖项。该奖项是业界对国际化合物半导体行业内的关键创新领域进行评判,围绕芯片制造工艺流程,强调对业界发展所作出的贡献。AIXTRON方面表示,AIXG5+C是全球首套完备的MOCVD系统解决方案,可以满足硅基氮化镓LED和功率器件领域的外延类产品需求。该产品融合两项关键性创新,
简介:Dempster-Shaferevidencetheory(DStheory)iswidelyusedinbrainmagneticresonanceimaging(MRI)segmentation,duetoitsefficientcombinationoftheevidencefromdifferentsources.Inthispaper,animprovedMRIsegmentationmethod,whichisbasedonfuzzyc-means(FCM)andDStheory,isproposed.Firstly,theaveragefusionmethodisusedtoreducetheuncertaintyandtheconflictinformationinthepictures.Then,theneighborhoodinformationandthedifferentinfluencesofspatiallocationofneighborhoodpixelsaretakenintoconsiderationtohandlethespatialinformation.Finally,thesegmentationandthesensordatafusionareachievedbyusingtheDStheory.ThesimulatedimagesandtheMRIimagesillustratethatourproposedmethodismoreeffectiveinimagesegmentation.