摘要
Inthiswork,TeO0.7thinfilmswerepreparedbythereactivemagnetron-controllingsputteringmethod.Complexgray-scalepatternsweresuccessfullyfabricatedonTeO0.7thinfilmsthroughthelaserdirectwritingmethod.ThestructuraloriginofTeO0.7thinfilmwasinvestigatedforgray-scalepatternformation.Itisfoundthatmultiplegray-scalelevelsaredependentonthe'virtual'bandgapenergyofTeO0.7thinfilms.Thebandgapenergychangesleadtorefractiveindexandreflectivitydifference.Thus,gray-scaletonescanbeformed.Byaccuratelycontrollinglaserenergy,various'virtual'bandgapscanbegeneratedinTeO0.7thinfilms,andcolorfulgray-scalelevelscanbeformed.ExperimentalresultsindicatethatTeO0.7thinfilmcanbeusedasmicro/nanoimagewritingmaterial.
出版日期
2017年01月11日（中国期刊网平台首次上网日期，不代表论文的发表时间）
