简介：

简介：

简介：

简介：MechanicalqualityfactorQmisakeycharacteristicparameterofHigh-overtonebulkacousticresonator(HBAR).Theeffectsofstructureparameter(thickness)andperfor?manceparameters(characteristicimpedanceandmechanicalattenuationfactor)ofsubstrate,piezoelectricfilmandelectrodeconstitutingHBARonQmarecarriedout.TherelationshipsbetweenQmandtheseparametersareobtainedbyalumpedparameterequivalentcircuitinsteadofdistributedparameterequivalentcircuitneartheresonancefrequency,andthean?alyticalexpressionsoiQmaregiven.TheresultsshowthatQmincreasesnon-monotonicallywiththecontinuousincreaseofthesubstratethicknessforHBARwithcertainpiezoelectricfilmthickness,anditapproachestothesubstratematerialmechanicalqualityfactorasthesubstratethicknessislarge.QmdecreaseswavilywiththecontinuousincreaseofthepiezoelectricfilmthicknessforHBARwithcertainsubstratethickness.SapphireandYAGwithlowmechanicallossareappropriateasthesubstratetogetalargerQm-TheelectrodelossmustbeconsideredsinceitcanreduceQm-ComparedwithAuelectrode,A1electrodewithlowerlosscanobtainhigherQmwhentheappropriateelectrodethicknessisselected.Inaddition,Qmdecreaseswiththeincreaseoffrequency.TheseresultsprovidethetheoreticalbasisforoptimizingtheparametersofHBARandshowthattrade-oflFsbetweenQmandmustbeconsideredinthedesignbecausetheirchangesareofteninconsistent.

简介：

简介：ARevisedEditionofthenow-classical1971texteditedbyL.Beranek,NoiseandVibrationControl,hasbeenpublishedbytheInstituteofNoiseControlEngineering.NoiseandVibrationControlisofgreatvaluetodesignandsafetyengineers,consultants,scientists,architects,governmentresearchers,publicofficialsandothersconcernedwiththecontrolofnoiseemittedbymachineryandwithcontrolofenvironmentalnoiseinbuildings,intheworkplace,nearairportsandhighways,andinthecommunity.This

简介：

简介：

简介：