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2014年8期
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Low Concentration of CO Gas Sensor by Atomic Layer Deposition
Low Concentration of CO Gas Sensor by Atomic Layer Deposition
(整期优先)网络出版时间:2014-08-18
作者:
Mehmet Demir;Ozlem Barin;Irmak Karaduman;Dilber Esra Yildiz;Selim Acar
理学
>物理
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物理科学与应用:英文版
2014年8期
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相关关键词
气体传感器
原子层沉积
CO分子
低浓度
二氧化钛
操作温度
Low Concentration of CO Gas Sensor by Atomic Layer Deposition
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